Semiconductor manufacturing technology textbook recommendations

[[email protected]]

I'm considering purchasing a textbook for self study on semiconductor manufacturing technology and have come across a possible candidate published by the SPIE: Introduction to Semiconductor Manufacturing Technology, 2ed, HongXiao, 2012, 704pp, ISBN: 9780819490926, Volume: PM220.

http://spie.org/x648.html?product_id=924283&WT.mc_id=KTOP2013E

I'm holding off buying it straight away, even though it is a member's sale special, because the review says it has a minimal amount of maths, physics or chemistry. If I'm going to buy it, I want something a bit meatier. Any recommendations?

Thanks in advance.

 

[miso]

I think the ugly math is in the semiconductor physics books. If you want
to lean about manufacturing, this book sounds good to me.

You would really have to ask on a forum used by process engineers, not
designers. The average designer these days has probably never worn a
bunny suit.

 

[Bill Sloman]

I think the ugly math is in the semiconductor physics books. If you want to lean about manufacturing, this book sounds good to me.

You would really have to ask on a forum used by process engineers, not designers. The average designer these days has probably never worn a bunny suit.

Probably not. Back when I got to wear a bunny suit from time to time, the expectation was that the wafers were eventually going to be shifted from machine to machine in air-tight cassettes, latching onto carefully purged airlocks, and the fabs wouldn't need the bunny suits on the shop floor.

The fabs would still need clean areas in which to dismantle and reassemble the machines, but the chip designers wouldn't have been allowed into those areas anyway.

 

[[email protected]]

I'm considering purchasing a textbook for self study on semiconductor manufacturing technology and have come across a possible candidate published by the SPIE: Introduction to Semiconductor Manufacturing Technology, 2ed, Hong Xiao, 2012, 704pp, ISBN: 9780819490926, Volume: PM220.



http://spie.org/x648.html?product_id=924283&WT.mc_id=KTOP2013E



I'm holding off buying it straight away, even though it is a member's sale special, because the review says it has a minimal amount of maths, physics or chemistry. If I'm going to buy it, I want something a bit meatier. Anyrecommendations?



Thanks in advance.

Please check out the 2008 textbook by
Micheal Quirk and Julian Serda - named
'Semiconductor Manufacturing Technology'.
These are chemical engineers, by the way.
Also, if you have any connections with
any University, please check out the
engineering library. Years ago, when I
was at UT Austin, I came across an
excellent book, just say 80 - 90 pages,
with detailed practical worked out
examples related to dry/wet oxide growth,
etching time, how to estimate time for
doping for say a predetermined donor
concentration etc., -- the small but
crucial steps that make the whole
process work. Unfortunately, I forget
the name of the book.
HTH.

 

[[email protected]]

Thank you, miso, Bill Sloman and daku.

Like you say, most of the maths and physics I'll find in a semiconductor physics text. It is the chemical processes and materials science I have only rudimentary knowledge of and am curious about. I'm especially curious aboutthe transition from a discrete component prototype circuit to an integrated circuit.

I did look around google groups for a more appropriate forum and did find 'Semiconductor Fabrication', but that forum is dead and full of spammers.

I have found also some youtube posts on how to make your own FETs, which I hope to try.

 

[RobertMacy]

I have found also some youtube posts on how to make your own FETs, which
I hope to try.

Did you find the Motorola book?

Also, should look into Ion Implantation. It is my understanding that
without such, CMOS could never have come into existence.

To me, there are two MAJOR technologies in semiconductor processing:
1. chemical processes
2. masking processes

Major things have happened in both