J
Joerg
- Jan 1, 1970
- 0
Folks,
In order to achieve much higher inductance than the usual few
nanohenries on RF chips I am looking at MEMS structures, deposited core
materials and such. It's been done at labs quite a while ago, for example:
http://www.mems.gatech.edu/msma/pub...s on Silicon Wafers for MEMS Applications.pdf
I am especially curious about the spiral inductor with core in figure 1.
If you need very little in current handling and can exclude any DC
current it should be possible to achieve a higher inductance in a given
space than here. We'd have maybe 1/4th to 1/3rd of the real estate they
had but tens of ohms in DC resistance would be ok. If needed one could
also consider more metal layers. We'd probably have to run it at
13.56MHz. Also at a much lower frequency but there the inductance could
collapse or be whatever it wants to be.
Did anybody ever see this in real life? Experiences? Foundry?
In order to achieve much higher inductance than the usual few
nanohenries on RF chips I am looking at MEMS structures, deposited core
materials and such. It's been done at labs quite a while ago, for example:
http://www.mems.gatech.edu/msma/pub...s on Silicon Wafers for MEMS Applications.pdf
I am especially curious about the spiral inductor with core in figure 1.
If you need very little in current handling and can exclude any DC
current it should be possible to achieve a higher inductance in a given
space than here. We'd have maybe 1/4th to 1/3rd of the real estate they
had but tens of ohms in DC resistance would be ok. If needed one could
also consider more metal layers. We'd probably have to run it at
13.56MHz. Also at a much lower frequency but there the inductance could
collapse or be whatever it wants to be.
Did anybody ever see this in real life? Experiences? Foundry?