Maker Pro
Maker Pro

How to solve layout Minimum Density Area across chip / CHIP Area must be >= 14%

B

Boki

Jan 1, 1970
0
Dear All:

When I using TSMC 0.35 2P4M process to layout, the DRC error report
these messages:

1. POLY Minimum Density Area across chip / CHIP Area must be >= XX%
2. M1 Minimum Density Area across chip / CHIP Area must be >= XX%
3. M2 Minimum Density Area across chip / CHIP Area must be >= XX%
4. M3 Minimum Density Area across chip / CHIP Area must be >= XX%
5. M4 Minimum Density Area across chip / CHIP Area must be >= XX%

But, in my layout design, I did't need these layers or area, could you
please give me some suggest?

Thanks!

Boki.
 
D

Dwayne

Jan 1, 1970
0
It's always best to ask your questions to the people supporting the
technology, but if that's not possible or you're looking for a faster
response the here is my two cents.
Check to make sure that they are in fact errors and not just warning. If
they are error then the area maybe necessary for the CMP (chemical
mechanical polish) steps. If so them you'll need to include the minimum
area to prevent dishing. Try to include them in the space between lines or
pads, but make sure you don't violate any minimum spacing rules. Create
towers of the unused layers, ensuring you don't violate any of the overlap
rules. If your design is tightly packed, you may need to increase your
real-estate.

Dwayne
 
Top