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oxidation in fabrication

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vead

Nov 27, 2011
473
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Nov 27, 2011
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silicon die oxide layer is formed on the surface of silicon wafer by the oxidation process
oxidation process
oxidation method
dry oxidation
wet oxidation


dry oxidation
Si+O2 -.> Sio2
wet oxidation
Si+2H2O -> Sio2+2H2

dry and wet oxidation are the type of thermal oxidation or thermal oxidation is different hings ?

what is post oxidation evaluation
 
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